Desktop-Scanning Electron Microscope (SEM) with EDX Option

The Phenom Electron Mircosopes are not only smaller, simpler and cheaper than a floor-model. Thanks to their low vacuum in sample chamber they are faster and do not require any coating for non-conductive surfaces!

The product line consists of:

            • Phenom XL (For large samples up to 100x100mm, 62mm height)
            • Phenom Pro, ProX, Pure (Magnification up to 350,000 x, resolution 6-8nm)
            • Phenom Pharos (Field Emission Cathode for highest resolution, magnification up to 2’000’000 x !)
            • Phenom GSR (Automated Gunshot Residue Analyse for forensic solutions)
            • Phenom Particle X (Automated particle analysis according to VDA19/ISO16232 for technical purity and additive manufacturing)
            • Axia ChemiSEM (floor-model for samples with up to 10 kg weight)

As option, all systems can be upgraded with SED and EDX detectors. The acceleration voltage can vary between 4.8 and 20.5 kV.

Under those links ( How to Choose a SEM E-guide ) you will find some tips for how to choose optimal SEM system for you.

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PHENOM PRO, ProX (350’000x, <8nm Resolution, EDX Elemental Analysis)

  • Excellent image quality thanks to the CeB6 source  with high brilliance at low acceleration voltages
  • Ca. 1500 working hours of the source (4-6 years of typical use)
  • Magnification up to 350’000x (plus 12x digital zoom)
  • Variable acceleration voltage (for ProX and XL)
  • EDX elemental anaylsis (optional for Phenom Pro and Pure)
  • Optional SED Detector
  • Fast sample preparation
  • Easy and fast sample transfer (10-15 seconds)
  • Intuitive navigation
  • Motorized precision-XY stage
  • Color CCD camera incl. zoom 20x up to 120x (Pro and ProX)
  • Robust, space-saving construction; straightforward operation
  • As options: 3D reconstruction, surface roughness measurement, stitching and automatic measurement of fiber cross-sections.

ParticleMetric Software (Particle Measurement)

 

 

Phenom XL G2(200’000 x, <10nm Resolution with Optional EDX Elemental Analysis and SE Detector)

  • Excellent image quality thanks to the CeB6 source  with high brilliance at low acceleration voltages
  • Ca. 1500 working hours of the source (4-6 years of typical use)
  • Magnification up to 200’000x (plus 12x digital zoom)
  • Variable acceleration voltage (for ProX and XL)
  • EDX elemental anaylsis (optional for Phenom Pro and Pure)
  • Optional SED Detector
  • Fast sample preparation
  • Easy and fast sample transfer (30-40 seconds)
  • Intuitive navigation
  • Motorized precision-XY stage
  • Color CCD camera incl. zoom 20x up to 120x (Pro and ProX)
  • Robust, space-saving construction; straightforward operation
  • As options: 3D reconstruction, surface roughness measurement, stitching and automatic measurement of Asbestos Filter Analysis.

ParticleMetric Software (Particle Measurement)

Phenom Pharos G2 FEG-SEM (2’000,000 x, 2nm Resolution with Optinal EDX Elemental Analysis and SE Detector)

  • Field Emission Cathode with EXCELLENT 2nm resolution
  • COMPETITIVE WITH FLOOR-MODELS
  • High Vacuum Mode
  • Medium Vacuum Mode
  • Integrated Charge Reduction (Low Vacuum Mode)
  • Standard: 5 kV, 10 kV und 15 kV
  • Extended mode: adjustable between 1 kV and 20 kV
  • Backscattered Electron Detector (Standard)
  • Detector for Energy Dispersive X-Ray Spectroscopy (EDS/EDX) (optional)
  • Secondary Electron Detector (Everhart Thornley-optional)
  • Sample Size up to 25 mm diameter (32 mm optional)
  • Sample Size up to 35 mm (100 mm optional)

Phenom GSR (Gun Shot Residue, ASTM E1588-17 compatible)

  • Sample size max. 100 mm x 100 mm (up to 30 x 12 mm Pin Stubs), max. 40 mm (Height)
  • Software specifications:
    • Complies with ASTM E1588-17
    • Typically ≥ 98 % match with standardized Plano-GSR-samples
    • Supports classification of lead-free ammunition types
    • Automatic Calibration for reproducible results
  • Detector types
    • Silicon-Drift-Detektor (SDD)
    • Peltier-chilling (LN2-frei)
  • Reporting-Workflow: Particle drift, user-friendly reporting system
  • Acquisition-mode: 316 (W) x 587 (L) x 625 (H) mm

Phenom Particle X (200’000 x, <10nm Resulution, EDX Elemental Analysis and SED as Options)

  • Excellent solution for reliable MATERIAL ANALYSIS, e.g. for AUTOMOTIVE INDUSTRY
  • Technical purity check on micrometer scale thanks to EDX Analysis
  • Acceleration voltages:
    • Standard: 5 kV, 10 kV and 15 kV (expanded mode: adjustable range between 4,8 kV and 20,5 kV)
  • Vacuum levels
    • Low
    • Medium
    • High
  • Detectors:
    • Backscattered-Electron-Detector (standard)
    • Detector for energydispersive X-Ray spectroscopy (EDS) (standard)
    • Secondary electron detector (Everhart-Thornley-Detector, optional)
  • Sample size:
    • max. 100 mm x 100 mm (up to 36 x 12 mm stubs)
    • max. 40 mm (h)
  • Exemplary transfer time
    • Light-optical <5 s
    • SEM <60 s

Axia ChemiSEM (1’000’000x Polaroid Resolution, up to 3 nm Resolution, ideal for EDX Analysis)

  • Semi-Floor-Model
  • Maintenance-friendly (the source can be easily exchanged by the user)
  • Motorized, retractable backscattered detector
  • TrueSight EDS-Detector
  • Nav-Cam Camera – optical color camera for sample navigation
  • Manual user interface
  • IR-Chamber-Camera
  • Maps Software for Tiling and Stitching the images
  • Electron beam resolution:
    • 3,0 nm at 30 kV (SE)
    • 3,0 nm at 30 kV (SE) (low vacuum)
    • 8,0 nm at 3 kV (SE)
    • 7,0 nm at 3 kV (BD-Modus* + BSE)
  • Chamber:
    • inner width: 280 mm
  • Contacts: an Axia ChemiSEM scanning electron microscope with BSED and EDS offers 5 available ports
  • Stage:
    • xy: 120 x 120 mm
    • Tilt: -15 bis +90 Grad
    • Rotation: n x 360°
    • With removed ZTR-Axis:
      • Max. Sample height: 128 mm
      • Max. Sample weight: 10 kg
  • Typical options
    • Beam Deceleration Mode
    • CleanHeater for Stage (up to 1.100 °C)
    • Cathode Luminescence Detector
    • AutoScript 4 Software – Python-based application programming interface
    • Thermo Scientific TopoMaps Software for image coloring, image analysis and 3D surface reconstruction

Applications

  • Pharmaceutical Industry
  • powder
  • Particle size measurement
  • Nanoparticles
  • Metallurgical Analysis
  • Process control
  • Quality control
  • Research laboratories
  • Fibermetric for the analysis of textile fibers
  • Asbestos analysis according to VDI 3492 (with AsbestosScan software)
  • Technical purity according to VDA19 / ISO16232
  • Additive manufacturing (quality control)
  • Table SEM, table electron microscope, tabletop SEM
  • EDX, EDS

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