A wide range of lenses is available, including 1.25x – 150x standard lenses, long working distance lenses, extremely long working distance lenses, lenses with refractive index correction by transmissive lenses, liquid immersion lenses and interferometric lenses.
Four different optical couplers are available to change the optical magnification. The system can be configured with the 1x coupler to maintain the native magnification, or with 0.35x, 0.5x or 0.63x couplers to increase the magnification.
The units can be configured with a manual 5x or 6x turret and a lens sensor for automatic lens recognition. The system can also be configured with a motorized 6-position turret for fully automatic operation.
The systems use two extra-bright white LEDs as standard illumination. Transmitted light illumination for demanding transparent samples, such as patterned sapphire substrates (PSS), is also available as an option.
Zeta systems can be equipped with different Z-drives to improve system performance. A piezo Z drive can be added to improve the Z resolution for measuring step heights in the nanometer range using the ZDot or ZXI measurement modes. The Z table can be mounted on a swivel arm to rotate the head around the sample to change the angle of incidence on the surface. An optional 280 mm Z column can accommodate large parts such as trays, phones and large machine components. The XY table can be selected with a manual travel of 300 mm or a motorized travel of 150 or 200 mm. A manual turntable can be added to the XY table. A manual tilting table for sample alignment in interference mode can be added.
A range of sample holders are available, including chucks with recesses for transparent substrates to support transmitted light illumination. Support for multiple wafer sizes, including 300 mm, and multiple sample holders are available. If we do not have the sample holder you require, please contact KLA-Tencor with your requirements.
Vibration Isolation Tables
The Zeta-300 and Zeza-388 units are already equipped with passive vibration isolation by default. To improve performance, we also offer active vibration isolation systems.
Standards for step height and layer thickness
The Zeta-300 uses thin and thick film NIST traceable step height standards offered by VLSI standards. The standards have an etched quartz stage with chrome plating. A step height range from 8 nm to 250 µm is available.
An available certified multi-stage standard has nominal step heights of 8, 25, 50 and 100 µm. The standard has various patterns for XY calibration. A certified film thickness standard is available for ZFT, which includes a reference silicon surface and a nominal 270 nm silicon dioxide film thickness. Reference roughness and mirror samples are also available.
Automated sequencing software
The automated sequencing software allows programming of the motorized XY stage for automated measurements at different sample positions. Results are stored in user-defined folders. An output report with statistics is generated to summarize the results.
The advanced sequencing software includes pattern recognition for automatic sample alignment. This allows fully automated measurements and reduces the effects of operator errors. Automatic calibration can also be enabled when integrated standards are used on the stage.
The automated image stitching software uses the motorized XY table to move to adjacent surface positions and generate a large overall image from the individual measurements. The system automatically measures each location, aligns the images and combines them into a single data set. The results can be analyzed like any other result file.
Additional Analysis Software
The Apex analysis software extends the standard functionality of the data analysis tool by a number of analysis methods such as sample leveling, filtering, step height measurement or roughness measurement. The latest ISO roughness calculation methods and local standards such as ASME are supported. The software also serves as a report writing platform with the ability to add text, annotations and pass/fail criteria. The software is available in eight languages.
Offline Analysis Software
The offline software has the same functions for data analysis and recipe creation as the tool. This way, the user can create recipes and analyze data without taking up valuable tool time.