Stylus Profilers

KLA Instruments™

The advantage of the stylus measurement technique is the direct measurement, independent of material properties. Adjustable force and choice of stylus allow accurate measurements of a wide variety of structures and materials. This enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress.

KLA Instruments™ Alpha-Step® D-Series and Tencor P-Series stylus profilometers are high-precision analysis tools with industry-leading stability and reliability.
They cover a wide application range from compact lab analysis systems for step height and surface roughness up to automated production tools in SECS/GEM environment with wafer handler and a lot of measurement options for 2D and 3D analysis.

Alpha-Step D-Series Stylus Profilers

The KLA Instruments™ Development Series of benchtop stylus profilers offer the most complete range of measurement features to meet the needs of the engineering and research communities. These research-grade products merge capability and value with the tool performance expected from KLA-Tencor’s metrology products.

The innovative optical lever sensor technology offers high resolution measurements, large vertical range (from nm up 1200µm)
and low force measurement capability (from 0.03-15mg).

A 5MP high-resolution color camera with 4x zoom and Keystone Correction allows a perfect view on the sample for finding and saving measurement locations.

The graphical user interface with multi-document function allows users to continually acquire, display and analyze scan data.

Alpha-Step® D-500

Features

  • Sample Size: 140mm, 20mm height
  • Manual XY-Stage: 30mm scan length
  • Smallest stylus profiler footprint: 25cm x 39cm
  • User friendly aquisition and analysis software on Win 10, 64 bit PC

Alpha-Step® D-600

Features

  • Sample Size: 200mm, 30mm height
  • Motorized XY-Stage: 55mm scan length + Stitiching
  • Small system footprint: 38cm x 60cm
  • User friendly aquisition and analysis software on Win 10, 64 bit PC

Options:

  • 3D aquisition and data analysis
  • 2D thin film stress

Tencor P-Series Stylus Profilers

The Tencor Production Series stylus profilers are industry-leading analysis and control tools, built on over 40 years of surface metrology experience, resulting in the best performance, most advanced automation features and highest throughput available on the market.

Excellent measurement stability is achieved with the combination of the UltraLite® sensor, constant force control and an ultra-flat scanning stage.
Recipe setup is fast and easy with point-and-click stage controls, top and side view optics and a high-resolution camera with optical zoom.
2D and 3D measurements are supported, with a variety of filtering, leveling, and data analysis algorithms available to quantify the surface topography.

Fully automated measurements are achieved with automated wafer handling, pattern recognition, sequencing and feature detection.

Tencor™ P-7

 

The Tencor P-7 is a great price-to-features ratio benchtop profiler.
It supports 2D and 3D measurements of step heights, roughness, bow and wafer stress.

 

Features

  • Motorized XY-Stage:
    150mm scan length without stitiching
  • Step height: Nanometers to 1000µm
  • Low force with constant force control:
    0.03 to 50mg
  • Aquisition and analysis software with advanced user management system

Options:

  • 2D and 3D stress measurements
  • Defect Mapping
  • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

Tencor™ P-17

 

The Tencor P-17 is an eighth generation benchtop stylus profiler, built on over 40 years of surface metrology experience..
This industry leading system supports 2D and 3D measurements of step height, roughness, bow, and wafer stress.

Features

  • Motorized XY-Stage:
    200mm scan length without stitiching
  • Step height: Nanometers to 1000µm
  • Low force with constant force control:
    0.03 to 50mg
  • Aquisition and analysis software with advanced user management system

Options:

  • 2D and 3D stress measurements
  • Defect Mapping
  • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
  • Open Frame configuration to allow loading of larger samples, on a 240 x 240mm or 300mm wafer chuck.

Tencor™ P-170

 

The Tencor P-170 is a cassette-to-cassette profiler with advanced pattern recognition algorithms, enhanced optics, and an advanced stage for robust performance and seamless recipe transportability between systems – a key requirement for a 24×7 production environment.

Features

  • Motorized XY-Stage:
    200mm scan length without stitiching
  • Step height: Nanometers to 1000µm
  • Low force with constant force control:
    0.03 to 50mg
  • Aquisition and analysis software with advanced user management system
  • Wafer handler to automatically load 75mm-200mm opaque or transparent wafers
  • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

Options:

  • 2D and 3D stress measurements
  • Defect Mapping
  • Second cassette station for enhanced productivity

 

 

2D Roughness3D Roughness2D Step Height3D Step Height3D Topography2D Film Stress3D Bow and StressPattern Recognition AlignmentDefect InspectionSECS-GEM CommunicationVarious Vacuum ChucksStyli 40nm-50µm, Various ShapesCertified Height Standards 8nm-250µm

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