Multimode Testing Platform

KLA Instruments™, Nanomechanics

KLA Instruments™ Nanoindenters G200 and G200X measure Young’s modulus and hardness, including measurement of deformation over six orders of magnitude (from nanometers to millimeters). The systems can also measure the complex modulus of polymers, gels and biological tissue, as well as the creep response (strain rate sensitivity) of thin metallic films.

 


 

Production-proven with automated high-throughput hardness measurement capability: With the largest force range in the KLA nanoindenter product family, G200 features the well established XP-Indenter head with up to 500 mN of force and the DCMv2-head for forces below 30 mN and the award-winning Express-Test option. The industry-leading G200X however integrates the same InForce indenter as The iMicro and iNano nanoindenters.

Both systems have an extendible multi-mode platform for upgrade options like surface imaging, scratch testing, high temperature measurement and conductive nanoindentation, complete with statistical data analysis package as well as, expanded load capacity up to 10N, and custom test protocols.

They also provide a wide array of imaging capabilities, including a high resolution integrated probe-based imaging or a survey-scanning mode that is ideal for scratch and wear testing on large samples, or for working with large, irregularly shaped, and/or heterogeneous samples.

 

Features

  • Electromagnetic actuator to achieve the high dynamic range in force and displacement
  • Testing parameters can be changed with just a few mouse clicks
  • Real-time experimental control, easy test protocol development and precise thermal drift compensation
  • Versatile imaging capabilities, survey scanning, and streamlined test method development for rapid results
  • Simple determination of indenter area function and load frame stiffness

 

Applications

  • High-speed hardness and modulus measurement
  • Interfacial adhesion measurement
  • Fracture toughness measurement
  • Viscoelastic properties measurement
  • Scanning probe microscopy (3D imaging)
  • Wear and scratch resistance
  • High-temperature nanoindentation

 

Industries

  • Universities, research labs and institutes
  • Semiconductor and electronics industry manufacturing
  • Tire industry
  • Coating and paint industry
  • Biomedical industry
  • Medical devices

 

 

 

Options & Upgrades

 

Continuous Stiffness Measurement (CSM)

The Continuous Stiffness Measurement (CSM) technique satisfies application requirements that must take into account dynamic effects, such as strain rate and frequency.
The CSM option offers a means of separating the in-phase and out-of-phase components of the load-displacement history. The separation provides an accurate measurement of the location of initial surface contact and continuous measurement of contact stiffness as a function of depth or frequency, thus eliminating the need for unloading cycles

AccuFilm™ Thin Film Method Pack

An InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

Provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

NanoBlitz 3D

Utilizes the InForce 50 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

Utilizes the InForce 50 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30×30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

Biomaterials Method Pack

Provides the ability to measure the complex modulus of biomaterials with shear moduli in the order of 1kPa, and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small-scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Involves the application of either a constant or a ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the indenter system equipped with the exclusive InView option.

Heating Stage

The precision heating stage facilitates the study of materials of interest as they are heated from room temperature to as high as 350C. To ensure reliable data, the system’s software compensates for drift associated with heating.

High Load

Expands the load capabilities up to 10 N of force, allowing the complete mechanical characterization of ceramics, bulk metals, and composites. The High Load option has been engineered to avoid sacrificing the instrument’s load and displacement resolutions at low forces while seamlessly engaging at the point in the test protocol when extra force is required.

Lateral Force Measurement

Provides three-dimensional quantitative analysis for scratch testing, wear testing, and MEMS probing. This option enables force detection in the X and Y directions to examine shear forces. Tribological studies use the LFM for determination of the critical load and coefficient of friction over the scratch length.

Survey Scanning 

Utilizes the accurate, repeatable X/Y motion of the Nanoindenter G200X system to provide a maximum scan size of 500μm by 500μm. The NanoVision stage and Survey Scanning options can be used together for precise location targeting for nanoindentation tests, particularly valuable for determination of sample fracture toughness

NanoVision 

The nanomechanical microscopy option delivers quantitative imaging by coupling a linear electromagnetic actuation-based indentation head with a closed-loop nano-positioning stage.

Standard NanoVision methods provide quick setup to obtain 3D results, while its interactive mode of operation provides a flexible platform for customization of scan routines. NanoVision allows users to create quantitative high-resolution images using a nanoindenter, target indentation test sites with nanometer-scale precision, and examine residual impressions in order to quantify material response phenomena such as pile-up, deformed volume, and fracture toughness. This option also lets users target and characterize individual phases of complex materials.

  • Create quantitative high-resolution nanoindenting images
  • Target indentation test sites with nanometer-scale precision
  • Quantify material response phenomena such as pile-up, deformed volume, fracture toughness
  • User control over scan area resolution & speed

 

Laser Heater 

The Laser Heater option for the Nano Indenter G200 system utilizes a precise high-power diode laser to heat both the stage and sample. Advantages include the ability to measure nanomechanical properties at precisely controlled temperatures and to test samples under highly dynamic temperature conditions. The system’s laser-heated indenter tip prevents disturbance of substrate temperature during measurement. Keeping the tip and sample at the same temperature enables high-temperature continuous stiffness measurements (CSM) with exceptional precision.

To ensure reliable data, the Laser Heater option minimizes drift associated with heating. Users have the option to purge samples with various gases to avoid contamination and oxidation.

  • Wide temperature ranges up to 500C
  • Ultrafast heating and cooling
  • Minimizes thermal drift
  • Easy, convenient operation
  • Option to purge samples with various gases to avoid contamination and oxidation
  • Dynamic measurements enabled by Continuous Stiffness Measurement (CSM) option

 

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