Micro- and Nanoindenter

KLA Instruments™, Nanomechanics

The iMicro and iNano indenters by KLA Instruments™ make measuring thin films, coatings and small volumes of material easy. The large dynamic range of force and displacement measurements allow an extensive range of materials and devices to be tested with accuracy and repeatability, including metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels.

Both instruments have a complete suite of options to expand testing to measurements at elevated temperatures, continuous stiffness measurements, and NanoBlitz3D/4D property mapping.  The compact platform comes with the high-speed InQuest controller and vibration isolation gantry built in to the enclosure.

While the iNano is mostly used to test soft materials using 50 mN force actuator, the iMicro can exert up to 1.000 mN of force to test hard materials at higher loads and larger depths. An optional 2D actuator for the iMicro can provide tribology, lateral force and other advanced research measuremets requiring the determination of force/displacement along two axes.


 

Features

  • Actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
  • Unique software-integrated tip-calibration system for fast, accurate tip calibration
  • High-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
  • XY motion system with easy mounting magnetic sample holder
  • Integrated microscope with digital zoom for precise indentation targeting
  • Hardness (ISO 14577) and modulus measurements (Oliver-Pharr)
  • High speed material property maps, Polymer tan delta, storage and loss modulus
  • High Temperature Nanoindentation Testing
  • Software package with RunTest, ReviewData, Reporting, University online training, and mobile application

 

Applications

  • Semiconductor and packaging
  • Polymers and plastics
  • Micro-electro-mechanical systems
  • Nanoscale universal testing
  • Ceramics and glass
  • Metals and alloys
  • Pharmaceuticals
  • Coatings and paints
  • Composites
  • Batteries and energy storage
  • Hard coatings
  • Automotive and aerospace

Options & Upgrades

 

Continuous Stiffness Measurement (CSM)

The Continuous Stiffness Measurement (CSM) technique satisfies application requirements that must take into account dynamic effects, such as strain rate and frequency.
The CSM option offers a means of separating the in-phase and out-of-phase components of the load-displacement history. The separation provides an accurate measurement of the location of initial surface contact and continuous measurement of contact stiffness as a function of depth or frequency, thus eliminating the need for unloading cycles

AccuFilm™ Thin Film Method Pack

An InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

Provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

NanoBlitz 3D

Utilizes the InForce 50 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

Utilizes the InForce 50 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30×30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

Biomaterials Method Pack

Provides the ability to measure the complex modulus of biomaterials with shear moduli in the order of 1kPa, and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small-scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Involves the application of either a constant or a ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the indenter system equipped with the exclusive InView option.

Heating Stage

The precision heating stage facilitates the study of materials of interest as they are heated from room temperature to as high as 350C. To ensure reliable data, the system’s software compensates for drift associated with heating.

Select your country

Wählen Sie Ihr Land | Sélectionnez votre pays

Select your country

Are you looking for products? Then select the country in which you are located or in which to deliver our products from the above list.

Wählen Sie Ihr Land

Sie suchen nach Produkten? Dann wählen Sie bitte aus der oben aufgeführten Liste das Land aus, in dem Sie sich befinden bzw. in das wir unsere Produkte liefern sollen.

Sélectionnez votre pays

Vous recherchez pour les produits? Alors s'il vous plaît sélectionner dans la liste ci-dessus? Mentionné le pays dans lequel vous vous trouvez ou dans laquelle nous voulons livrer nos produits.