The in-situ indenters by KLA Instruments™ can perform indentation, compression and other mechanical tests inside scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, or stand-alone vacuum chambers.

NanoFlip

The NanoFlip nanoindenter measures hardness, modulus, yield strength and performs other nanomechanical tests under both ambient and vacuum conditions. It is also used with optical microscopes, Atomic Force Microscopes (AFMs) and 3D profilers.

The NanoFlip stands out at tests such as pillar compression, while synchronizing the SEM images with the mechanical test data or performing fast measurements, which are key to testing heterogeneous materials in inert environments (e.g., glove boxes).

The revolutionary FIB-to-Test technology allows to tilt the sample by 90° for a seamless transition from FIB to indentation test without having to remove the sample.

InSEM® HT

The InSEM® HT nanomechanical test system provides mechanical properties testing at high temperature under vacuum on small volumes of material, without sacrificing accuracy or cost. The InSEM HT can view real-time deformation, adding to the understanding of material performance at elevated temperatures.

With temperatures ranging up to 800 °C, extreme temperature conditions can be simulated in situ in order to produce consistent, reliable test data. Single-crystal tungsten carbide tips on a molybdenum holder are optimized for use in high temperature test applications, and are available in several geometries.

It measures hardness, modulus and stiffness at high temperature by independently heating both the tip and sample. The accompanying InView software helps advanced researchers to develop novel experiments. Scientific publications show that the results match well to traditional large-scale high temperature test data. The combination of wide temperature range capability and low cost of ownership makes the InSEM HT a valuable tool in materials development research programs.

 

 

 

Features

  • Actuator with tip heating for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
  • High speed controller electronics with 100kHz data acquisition-rate and 20µs time-constant
  • Precise XYZ motion system for sample targeting
  • SEM video capture for synchronized SEM images with test data
  • Unique software-integrated tip-calibration system for fast, accurate tip calibration
  • InView control and data review software with Windows ® 10 compatibility and method developer for user-designed experiments

Options & Upgrades

 

Continuous Stiffness Measurement (CSM)

The Continuous Stiffness Measurement (CSM) technique satisfies application requirements that must take into account dynamic effects, such as strain rate and frequency.
The CSM option offers a means of separating the in-phase and out-of-phase components of the load-displacement history. The separation provides an accurate measurement of the location of initial surface contact and continuous measurement of contact stiffness as a function of depth or frequency, thus eliminating the need for unloading cycles

AccuFilm™ Thin Film Method Pack

An InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

Provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

NanoBlitz 3D

Utilizes the InForce 50 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

Utilizes the InForce 50 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30×30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

Biomaterials Method Pack

Provides the ability to measure the complex modulus of biomaterials with shear moduli in the order of 1kPa, and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small-scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Involves the application of either a constant or a ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the indenter system equipped with the exclusive InView option.

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