
Alpha-Step
KLA-Tencor is a leading manufacturer of stylus and optical profilers.
Products:
- Alpha-Step D-500 Stylus Profiler
- Alpha-Step D-600 Stylus Profiler
- P-7 Stylus Profiler
- P-17 Surface Profiler
- MicroXAM-100 Optical Profiler
- MicroXAM Optical Surface Profiler
Applications
- Measuring of surface topology, surface topography, roughness and profile.
- Very smooth surfaces in the order of nanometer roughness up to very rough surfaces.
- Semiconductor structures, MEMS, solar technology.
- Measurement of thin, transparent layers of some nanometers thickness up to several hundred micrometer thickness.
- Interferometry
- Optical Profiling
- Quality control in a production environment