Scanning Probe Microscope for use in SEM
NenoVision LiteScopeTM is a Scanning Probe Microscope designed for easy integration into Electron Microscopes.
The system allows to simultaneously characterize a sample area using both SPM and SEM using the same coordinate system.
The patent-pending unique CPEM (Correlative Probe and Electron Microscopy) function of the LiteScopeTM is a powerful enhancement to existing SEM’s.
The system is particularly effective in those circumstances in which conventional SEM does not provide sufficient information about the sample and in which the user requires extension to 3D imaging.
CPEM technology, with its correlative imaging, is an ideal approach to correct analysis and simple image interpretation.
Comprehensive sample analysis including:
- characterization of surface topography
- mechanical properties
- electrical properties
- magnetic properties
The LiteScope™ may also be combined with other SEM accessories:
- Focused Ion Beam (FIB)
- Gas Injection System (GIS)
for fabrication of nano/microstructures and surface modifications. In this combination, the LiteScope™ offers easy and fast 3D inspection of manufactured structures.