Scanning Probe Microscope for use in SEM
NenoVision LiteScopeTM is a Scanning Probe Microscope designed for easy integration into Electron Microscopes.
The system allows to simultaneously characterize a sample area using both SPM and SEM using the same coordinate system.
The patent-pending unique CPEM (Correlative Probe and Electron Microscopy) function of the LiteScopeTM is a powerful enhancement to existing SEM’s.
The system is particularly effective in those circumstances in which conventional SEM does not provide sufficient information about the sample and in which the user requires extension to 3D imaging.
CPEM technology, with its correlative imaging, is an ideal approach to correct analysis and simple image interpretation.