OCI Vacuum Microengineering

OCI Vacuum Microengineering

LEED and AES Spectrometer

The LEED and AES systems produced by OCI excel by:

  • Modular design: CF63, CF100, CF150 flanges, shutter, retraction mechanism, AES option
  • broad application field: insulators, semiconductors, metals, SAM surfaces
  • High-end performance: Highly brilliant miniature electron gun, mesh design with 0.2% energy resolution, MCP and Delay Line Detector technology
  • High-end comfort: Digital programmable USB control electronics LEED-image analyis system (14 bit CCD camera, analysis software for automatic I-V, I-t and spotprofile analysis)

  •   LEED – Auger spectrometers: Models BDL800HR & BDL600HR
  • LEED – AES with gain power of Microchannel Plates – Models BDL800IR-MCP & BDL600IR-MCP
  • mini-LEED with Integral Shutter – Model BDL450
  • Fempto-LEED with Integral Shutter – Model DLD-L800-ISH
  • Electron Guns: model IG10
  • Ion Sputtering Gun: model IG35 & IG70
  • Auger Depth Profiling Mini – System: model ADP2000
  • Digital Raster Scan – Model DRS-100
  • Digital LEED-AES Controllers – Models LPS075-D & LPS300-D & LOA10-AES
  • Digital Ion Sputter Gun Controller IPS3-D



LEED and Auger electron spectroscopy on insulators, semiconductors, metals and SAM surfaces


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