Sensofar optical profilometer
Sensofar is one of the leading manufacturers of optical profilometers.
Using a patented display technique, the manufacturer successfully combines the most important optical measuring modes in a very compact measuring instrument: confocal microscopy, interferometry and focus variation technology.
Switching between the various measurement techniques is done within a few seconds, which makes it possible to measure an extremely wide range of different samples in a very short time.
The application area ranges from the roughness measurement on extremely smooth surfaces with a vertical resolution of 0.01nm in the interferometer operation mode to measuring rough, very poorly reflecting surfaces with flank angles of up to more than 70 degrees in the confocal mode for e.g. the shape measurement of tools with angles up to 86 degrees.
The use of very short-wavelength blue LEDs with a short coherence length as light source guarantees also the highest possible optical resolution. The innovative lighting concept is achieved without any moving components in the measuring head and thus avoids the typical disadvantages of conventional confocal laser scanning or Nipkow disk-based systems.
As an option, a layer thickness measuring unit is also available for very thin, transparent layers from 50nm at a resolution of 0.1nm.